采用溶胶−凝胶法制备SiO2-ZrO2复合薄膜，研究溶胶成分和烧结工艺对薄膜开裂及其性能的影响。采用乌氏黏度计、热重分析仪(TG-DTG)、X射线衍射分析仪(XRD)和原子力显微镜(AFM)对薄膜进行表征。结果显示，溶胶的组成、特定温度的升温速率对薄膜的开裂起决定性作用；当SiO2:ZrO2(mol/ mol)=2:0.5时，制得溶胶粘度适中、透明稳定，干燥的凝胶在0.5 ºC/min的升温速率下升至600 ºC焙烧2 h，并在75ºC、190ºC和230ºC附近缓慢升温且适当保温后，可得无裂缝且均匀、透明的SiO2-ZrO2复合薄膜，所制备的薄膜具有较大的比表面积和较窄的孔径分布。

The SiO2-ZrO2 composite membrane was prepared by sol-gel method and this paper studied the effect of sol composition and sintering process on cracking and other properties of membrane and characterized it by using ubbelohde viscometer, thermal gravimetric analysis (TG-DTG), X-ray diffraction analyzer (XRD) and atomic force microscopy (AFM). The result showed that sol composition and heating rate of sintering process in a certain temperature of the membrane played a decisive role in cracking. It can be obtained moderate viscosity, transparent and stable sol when SiO2: ZrO2 (mol / mol) = 2:0.5. The no cracking, uniform and transparent SiO2-ZrO2 composite membrane with a large surface area and narrow pore size distribution can be gotten when calcination temperature of dried gel was 600℃ at the speed of 0.5 ºC/min for 2h, meanwhile heated up slowly and insulated at 75ºC、190ºC and 230 ºC.

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