采用溶胶-凝胶法，以异丙醇铝为前驱体，引入二甲基二乙氧基硅烷（DDS）制备疏水性Al2O3薄膜，并研究了DDS的加入量对薄膜结构及性能的影响。通过红外光谱(IR)、表面接触角、热重分析(TG-DTG)及原子力显微镜(AFM)等测试方法对样品的化学结构、润湿性、热稳定性及表面形貌等进行分析。实验结果表明，DDS的最佳加入量为5 %时，Al2O3薄膜表面的疏水基团-CH3丰富，其接触角为118°，疏水性良好；随着热处理温度的升高，薄膜中的疏水基-CH3逐渐减少，薄膜的疏水性能降低，实验确定的最佳烧结温度为200℃；薄膜表面具有细微的粗糙度。

Hydrophobic Al2O3 membrane can be prepared by adding diethoxy dimethyl silane (DDS) through sol-gel method using aluminum isopropoxide as raw material. Influence of DDS content on the structure and properties of the Al2O3 membrane were studied. Structure, wettability, thermal stability and surface morphology of hydrophobic Al2O3 membrane were analyzed by infrared spectroscopy(IR), contact angle, thermogravimetric analysis(TG-DTG) and atomic force microscope (AFM). The results show that the hydrophobic group-CH3 of Al2O3 membrane surface is rich when the optimal content of DDS is 5%, and the membrane has good hydrophobicity with 118° contact angle; as the temperature increased, the hydrophobic properties of the membrane reduced, the reason lied in the decreasing of hydrophobic -CH3, so the optimum sintering temperature is 200℃; the membrane surface has slight roughness.

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